On-Board IS-8 Cryopump Axcelis Optima Implanter
OEM: CTI
OEM Part Number: 8185247G001R
Description:
Brooks CTI-Cryogenics ON-BOARD IS-8 Cryopump
Harvested from Axcelis Optima Implanter
P/N 8185247g001r
S/N 2005CHE10709
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