On-Board IS-250FE Cryopump Axcelis Optima Implanter
OEM: Edwards
OEM Part Number: 8185249G001R
Description:
Edwards Vacuum CTI-Cryogenics ON-BOARD IS-250FE Cryopump
Harvested from Axcelis Optima Implanter
P/N 8185249G001R
S/N 2011CHE10704
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