Products

Axcelis 160KV upgrade Kit

Terminal EXH Kit - 72097 (1199850)

Terminal EXH Kit - 72099 (1185620)

LED Ultra - 71934 (11032780)

Gas Line chamber - 71931 (0050-76664)

Graphite Sheild E-Shower - 71938 (17121720)

Faraday Flag Assy - 71937 (1141471)

Chamber End Plate - No number

Flag Faraday - 71935 (1181831)

Bracket Angled - 17068520

EXH Kit - 17051500

Cover - 17081180

Cover Terminal - 17067300

Cover - 17067720

Cover Term Box - 1710831

Cover Terminal Plate - 17071160

Ground Graph Scan - E17026680

Plasma Shower - 71938

Plasma Shower Gun Assy - 1190160

Suppress Electrode Kit - 71939

SCE RGH Valve - 1181490

Arc Power Supply - 1204990

SDI ID - 17080520

Accel PSU - 71893

Glassman HVPS Dual 5KV - 2200109

Seiko Seiki STP-1000C PSU - 71915

Seiko Seiki STP-1000C Pump - 69878

Cover Flex - 17074820

Spacer Kit - 17022380

Cover Red Box - 17071140

Cover Red Box - 17071130

Plastic Bracket - 17249920

Plate - 172021871 Rev B

Plate - 17021871 Rev A

Graphite - 17335010

Cover upper Plasma Shower - 17249760

Lower Plasma Shower - 17249920

Upper Plasma Shower - 17249760

Ground Electrode - 17335030

G/Shield Electrode Shower - 17121720 Rev A

Cathode Bracket - 1706405

Ultra PEF - 17304680

Graphite - 17335010

Graphite - 1766531

Filter Box - 1184260

Flag faraday Assy - 1181831

ELS Upgrade - 17103190

Air Dist Manifold - 1169724

Kit - 17095340-C

Source align Jig - 17127550

Plastic Lid - 17099070

Corona Ring - 17100170

Plastic Lid - 71926

Non Puline - 71926

Metal Bracket - 1199240